Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing system and substrate position correction method

Substrate processing system and substrate position correction method

US Patent 9318363 · Granted Apr 19, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

On-chip dual-mode transmission line with spoof surface plasmon based on balun2025
Transfer method2022
Substrate processing apparatus2019
Processing apparatus and processing method2017
Substrate processing apparatus2017
Semiconductor manufacturing system2015
Semiconductor manufacturing system2015
Method of lowering temperature of substrate table, computer-readable storage med2015
Magnetic type rotation detection device and its manufacturing method2014
System, method and storage medium for controlling a processing system2013
Substrate positioning device, substrate positioning method and program2010
Method and device for processing semiconductor wafer2006