Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device

Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device

US Patent 9298110 · Granted Mar 29, 2016

Estimated economic value: $6,774,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vibration isolator for supporting a payload2025
Patterning device conditioning system and method2025
Lithographic system provided with a deflection apparatus for changing a trajecto2025
Lithographic system provided with a deflection apparatus for changing a trajecto2025
Lithographic apparatus2024
Lithographic apparatus and device manufacturing method involving a heater2022
Apparatus for and method of in-situ particle removal in a lithography apparatus2022
Projection system and mirror and radiation source for a lithographic apparatus2021
Lithographic apparatus comprising an object with an upper layer having improved 2021
Particle suppression systems and methods2021
Component for use in a patterning device environment2021
Mask assembly2021