Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fluid handling structure, a lithographic apparatus and a device manufacturing method

Fluid handling structure, a lithographic apparatus and a device manufacturing method

US Patent 9291914 · Granted Mar 22, 2016

Estimated economic value: $8,535,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Measurement system and method for characterizing a patterning device2025
Fluid handling system, method and lithographic apparatus2025
Fluid handling system, method and lithographic apparatus2025
Pressure control valve, a fluid handling structure for lithographic apparatus an2025
Pressure control valve, a fluid handling structure for lithographic apparatus an2025
Fluid handling system, method and lithographic apparatus2025
Fluid handling system, method and lithographic apparatus2025
Lithography apparatus and a method of manufacturing a device2025
Substrate table, immersion lithographic apparatus and device manufacturing metho2025
Lithographic apparatus and a method of operating the apparatus2024
Fluid handling system and lithographic apparatus2024
Electrode for use in a layered device structure, as well as a battery device2024