Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › SiCN and SiN polishing slurries and polishing methods using the same

SiCN and SiN polishing slurries and polishing methods using the same

US Patent 9284472 · Granted Mar 15, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Polishing composition and polishing method using the same2025
Chemical mechanical polishing compositions and methods of use thereof2025
Compositions for polishing cobalt and low-K material surfaces2021
Anti-corrosion polishing composition2020
Buffered slurry formulation for cobalt CMP2020