Method for preparing monosilane using trialkoxysilane

Assignee

• Oci Company

Inventors

• Taek Joong Kim (9 patents)
• Yong-Il Kim (202 patents)
• Kyung Yeol Kim (3 patents)
• Deok Yun Kim (3 patents)
• Ashurov Khatam (2 patents)
• Salikhov Shavkat (2 patents)
• Rotshteyn Vladimir (2 patents)
• Ashurova Khekayat (2 patents)
• Kurbanov Aziz (1 patents)
• Abdisaidov Ilyos (1 patents)
• Azizov Sultan (2 patents)
• Ashurov Rustam (1 patents)

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