MEMS backplate, MEMS microphone comprising a MEMS backplate and method for manufacturing a MEMS microphone

Assignee

• Epcos Ag

Inventors

• Leif Steen Johansen (8 patents)
• Jan Tue Ravnkilde (17 patents)
• Pirmin Hermann Otto Rombach (40 patents)
• Kurt Rasmussen (15 patents)
• Dennis Mortensen (16 patents)

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