Semiconductor device and manufacturing method thereof

Assignee

• Semiconductor Energy Laboratory

Inventors

• Toru Takayama (491 patents)
• Junya Maruyama (203 patents)
• Yumiko Ohno (92 patents)
• Masakazu Murakami (116 patents)
• Toshiji Hamatani (130 patents)
• Hideaki Kuwabara (289 patents)
• Shunpei Yamazaki (6,629 patents)

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