Fabry-perot interferometer with piezoelectric actuator contracting in radial direction on membrane

Assignee

• Sintef

Inventors

• Thor Bakke (11 patents)
• Ib-Rune Johansen (39 patents)
• Andreas Vogl (14 patents)
• Frode Tyholdt (6 patents)
• Dag Thorstein Wang (14 patents)

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