Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS device having a suspended diaphragm and manufacturing process thereof

MEMS device having a suspended diaphragm and manufacturing process thereof

US Patent 9233834 · Granted Jan 12, 2016

Estimated economic value: $1,157,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for manufacturing a capacitive pressure sensor and capacitive pressure se2025
Embedded permeable polysilicon layer in MEMS device for multiple cavity pressure2025
Semiconductor device and method for manufacturing a semiconductor device2024
Semiconductor device and method for manufacturing a semiconductor device2024
MEMS piezoelectric device and corresponding manufacturing process2024
Thermoelectric generator2024
Method of fabrication of an integrated thermoelectric converter, and integrated 2023
MEMS piezoelectric device and corresponding manufacturing process2022
Method for manufacturing a semiconductor die provided with a filtering module, s2021
Method for manufacturing microfluid delivery device2021
Method for manufacturing microfluid delivery device2021
Method for manufacturing microfluid delivery device2021