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Home › Microelectromechanical sensing structure for a capacitive acoustic transducer including an element limiting the oscillations of a membrane, and manufacturing method thereof

Microelectromechanical sensing structure for a capacitive acoustic transducer including an element limiting the oscillations of a membrane, and manufacturing method thereof

US Patent 9226079 · Granted Dec 29, 2015

Estimated economic value: $2,206,000 ⓘ

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