Microprobe, recording apparatus, and method of manufacturing microprobe

Assignee

• Kabushiki Kaisha Toshiba
• The University Of Tokyo

Inventors

• Yongfang Li (15 patents)
• Yasushi Tomizawa (34 patents)
• Akihiro Koga (72 patents)
• Gen Hashiguchi (16 patents)
• Masakazu Sugiyama (63 patents)

View full patent text on Google Patents →