Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Film forming apparatus, film forming method, method for optimizing rotational speed, and storage medium

Film forming apparatus, film forming method, method for optimizing rotational speed, and storage medium

US Patent 9200364 · Granted Dec 1, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor wafer transferring method and apparatus and boat for thermal treat1991
Process for saccharification of rootstocks and subsequent alcohol fermentation1984