Apparatus and method for calibrating extreme ultraviolet spectrometer

Assignee

• Korea Institute Of Science And Technology

Inventors

• Young Min Jhon (38 patents)
• Yong-Soo Kim (132 patents)
• Min Ah Seo (14 patents)
• Jae Hun Kim (128 patents)
• Min Chul Park (33 patents)
• Sun Ho Kim (123 patents)
• Deok Ha Woo (31 patents)
• Seok Lee (20 patents)
• Taik Jin LEE (13 patents)
• Myung-Suk Chun (13 patents)
• Woon Jo Cho (2 patents)

View full patent text on Google Patents →