Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma processing apparatus, plasma generating apparatus, antenna structure and plasma generating method

Plasma processing apparatus, plasma generating apparatus, antenna structure and plasma generating method

US Patent 9167680 · Granted Oct 20, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Antenna for inductively coupled plasma excitation, antenna unit for inductively 2025
Apparatus for plasma processing2025
Plasma processing method and plasma processing apparatus2025
Plasma processing apparatus and substrate processing method2025
Plasma processing apparatus and method for controlling source frequency of sourc2025
Plasma processing apparatus2025
Plasma processing apparatus2025
Substrate support and substrate processing apparatus2025
Plasma processing apparatus and plasma processing method2025
Plasma processing apparatus and plasma processing method2025
Plasma processing apparatus and plasma processing method2025
Radio frequency (RF) system with embedded RF signal pickups2025