Negative-working photosensitive siloxane composition

Assignee

• Az Electronic Materials (Luxembourg) S.A.R.L.

Inventors

• Daishi Yokoyama (18 patents)
• Atsuko NOYA (8 patents)
• Yuji Tashiro (18 patents)
• Naofumi Yoshida (60 patents)
• Yasuaki Tanaka (35 patents)
• Takashi Fuke (11 patents)
• Megumi Takahashi (16 patents)
• Katsuto Taniguchi (16 patents)
• Toshiaki Nonaka (37 patents)

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