Assignee
- Semiconductor Manufacturing International (Beijing)
- Semiconductor Manufacturing International (Shanghai)
Inventors
- Gangning Wang (12 patents)
- Chih-Chung Tai (5 patents)
- Guangli Yang (18 patents)
- Jiwei He (7 patents)
- Xianyong Pu (16 patents)
US Patent 9112025 · Granted Aug 18, 2015