Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Structured illumination for contrast enhancement in overlay metrology

Structured illumination for contrast enhancement in overlay metrology

US Patent 9104120 · Granted Aug 11, 2015

Estimated economic value: $13,091,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and systems for automatic measurements of optical systems2025
Means and methods of measuring refraction2025
Metrology and process control for semiconductor manufacturing2025
Methods and apparatus for addressing presbyopia2024
Metrology target design for tilted device designs2024
Eyeglass frames for pupillary distance measurement2023
Metrology and process control for semiconductor manufacturing2023
Calibration and image procession methods and systems for obtaining accurate pupi2023
TEM-based metrology method and system2023
Monocular optical device for automated refraction testing2023
Method and apparatus for measurement of a characteristic of an optical system2022
Method and apparatus for modeling an eye2022