Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Actively compensated stage having 5-DOF motion error compensation and motion error compensating method thereof

Actively compensated stage having 5-DOF motion error compensation and motion error compensating method thereof

US Patent 9079279 · Granted Jul 14, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multilateration system based on absolute distance measurement and multilateratio2025
Distance measuring device and measuring method by using visible laser and near-i2025
Pipe coupler having function of covering pipe2021
Cutting head operated by centrifugal force and cutting apparatus including the s2021
Cutting head operated by centrifugal force and cutting apparatus including the s2021
Ceria electrolyte for low-temperature sintering and solid oxide fuel cell using 2020
Hybrid cutting apparatus and method of cutting groove using the same2019
Apparatus and method for manufacturing blade2018
Apparatus and method for manufacturing blade2018
Apparatus and method for manufacturing blade2018
Trocar, method for manufacturing the same, and method for continuously manufactu2018
Trocar, method for manufacturing the same, and method for continuously manufactu2018