Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Functional film, liquid immersion member, method of manufacturing liquid immersion member, exposure apparatus, and device manufacturing method

Functional film, liquid immersion member, method of manufacturing liquid immersion member, exposure apparatus, and device manufacturing method

US Patent 9057955 · Granted Jun 16, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of manufacturing compound film2017
Sliding film, member on which sliding film is formed, and manufacturing method t2016
Functional film2016
Functional film2016
Composite plastic member and method for producing the same2016
Carbon nanotube assembly and manufacturing method thereof2010
Method for producing electronic device and electronic device2010
Optical element equipped with lanthanum fluoride film2004
Method for manufacturing an optical element containing fluoride in at least its 2002