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Home › Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer

Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer

US Patent 9021880 · Granted May 5, 2015

Estimated economic value: $9,129,000 ⓘ

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