Substrate measurement apparatus with electron distortion unit

Assignee

• Korea Research Institute Of Standards And Science

Inventors

• Byong Chon Park (6 patents)
• Ju Youb Lee (1 patents)
• Woon Song (2 patents)
• Jin Ho Choi (123 patents)
• Sang Jung Ahn (10 patents)
• Joon Lyou (2 patents)
• Won Young Song (7 patents)
• Jae Wan Hong (10 patents)
• Seung Hun Baek (1 patents)

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