Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Semiconductor device with air gap and method of fabricating the same

Semiconductor device with air gap and method of fabricating the same

US Patent 9006078 · Granted Apr 14, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods of forming patterns using hard mask2025
Semiconductor device with air gap and method of fabricating the same2017
Semiconductor device with air gap and method of fabricating the same2016
Non-contact switch2015
Method for manufacturing semiconductor device having multi-layered hard mask lay2013
Method for fabricating semiconductor device with buried gates2013
Semiconductor device and method of fabricating the same2013
Semiconductor device and method of fabricating the same2012
Method for forming active pillar of vertical channel transistor2012
Semiconductor device and method of fabricating the same including forming pillar2012
Semiconductor device and method for fabricating the same2011
Method of fabricating a semiconductor device with a channel formed in a vertical2011