Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Non-linearity determination of positioning scanner of measurement tool

Non-linearity determination of positioning scanner of measurement tool

US Patent 8990961 · Granted Mar 24, 2015

Estimated economic value: $3,177,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

FinFET electrical characterization with enhanced hall effect and probe2018
Film thickness metrology2017
Lens coating/contamination electronic detection2016
Film thickness metrology2016
Film thickness metrology2015
Integrated optical illumination reference source2015
Non-linearity determination of positioning scanner of measurement tool2011
Non-linearity determination of positioning scanner of measurement tool2011
Non-linearity determination of positioning scanner of measurement tool2011
Sample holder for holding samples at pre-determined angles2011
Integrated circuit and methods of measurement and preparation of measurement str2010
Integrated circuit and methods of measurement and preparation of measurement str2010