Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of manufacturing a three dimensional array having buried word lines of different heights and widths

Method of manufacturing a three dimensional array having buried word lines of different heights and widths

US Patent 8987111 · Granted Mar 24, 2015

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Hidden antenna apparatus and vehicle comprising same2025
Rolling apparatus for secondary battery electrode sheet, cathode electrode manuf2025
Semiconductor device and data storage system including semiconductor device2025
Semiconductor memory device and method of fabricating the same2025
Semiconductor memory device2025
Optical assembly for alignment inspection, optical apparatus including the same,2025
Semiconductor devices and data storage systems including the same2025
Semiconductor devices2025
Error handling device, semiconductor memory device including the same, and error2025
Method of fabricating semiconductor memory device having protruding contact port2025
Apparatus and method of measuring uniformity based on pupil image and method of 2025
Method of forming an integrated circuit devices having buried word lines2025