Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Charged-particle beam exposure apparatus and method of manufacturing article

Charged-particle beam exposure apparatus and method of manufacturing article

US Patent 8981321 · Granted Mar 17, 2015

Estimated economic value: $32,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Discharge detection device2025
Scanning apparatus, drawing apparatus, and method of manufacturing article2014
Positioning apparatus, exposure apparatus, and device manufacturing method2014
Charged-particle beam exposure apparatus and method of manufacturing article2013
Imprint apparatus and method for producing article2013
Optical unit and exposure apparatus having the same2010
Alignment apparatus2010
Optical element driving apparatus2010
Spark plug2009
Fluid control mechanism2009
Reflecting mirror and exposure apparatus using the same2008
Optical micromotor, micropump using same and microvalve using same2008