Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sputtering device and sputtering method

Sputtering device and sputtering method

US Patent 8968538 · Granted Mar 3, 2015

Estimated economic value: $27,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Sputtering apparatus and control method2025
Film forming apparatus and method of controlling film forming apparatus2025
Film forming apparatus and film forming method2025
Active capacitive stylus, sensor controller, related system and method2025
Active pen2025
Conductive superlattice structures and methods of forming the same2025
Layered body including inorganic substrate and polyamic acid cured product2025
Film forming apparatus, processing condition determination method, and film form2025
Trenched gate double diffused semiconductor device with channel impurity concent2025
Substrate transfer device and substrate processing system2025
Sensor board and display device2025
Vacuum transfer device, substrate processing system, and substrate processing me2025