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Home › Apparatuses facilitating fluid flow into via holes, vents, and other openings communicating with surfaces of substrates of semiconductor device components

Apparatuses facilitating fluid flow into via holes, vents, and other openings communicating with surfaces of substrates of semiconductor device components

US Patent 8956498 · Granted Feb 17, 2015

Estimated economic value: $18,841,000 ⓘ

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