Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for the fabrication of periodic structures on polymers using plasma processes

Method for the fabrication of periodic structures on polymers using plasma processes

US Patent 8951428 · Granted Feb 10, 2015

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for ultrasonic fabrication and sealing of microfluidics2025
Molecular resists based on functionalized polycarbocycles2012
Polycarbocyclic derivatives for modification of resist, optical and etch resista2008
Silylation of epoxy-containing photoresist films2001