Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS device having reduced deformations

MEMS device having reduced deformations

US Patent 8922864 · Granted Dec 30, 2014

Estimated economic value: $3,558,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Efficient optical transmission in LIDAR systems2025
Air-breathing platform-mounted SATCOM radome2025
MEMS mirror having spaced actuators2023
MOEMS apparatus and a method for manufacturing same2016
Electrostatically steerable actuator2016
MEMS device and methods for manufacturing and using same2015
MEMS device and methods for manufacturing and using same2014
MOEMS apparatus and a method for manufacturing same2014
MOEMS apparatus and a method for manufacturing same2012
Bouncing mode operated scanning micro-mirror2008
Bouncing mode operated scanning micro-mirror2008
Bouncing mode operated scanning micro-mirror2007