Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate storage pod and lid member thereof, and processing apparatus for a substrate

Substrate storage pod and lid member thereof, and processing apparatus for a substrate

US Patent 8893753 · Granted Nov 25, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Developing cartridge having electrode2025
Developing cartridge having electrode2024
Fine copper particles, method for producing fine copper particles and method for2023
Load port apparatus and method of driving the same2023
Circulating EFEM2022
Circulating EFEM2022
Developing cartridge having electrode2022
Electrode catalyst, composition for forming gas diffusion electrode, gas diffusi2022
Copper fine particle, method for producing same, and sintered body2022
Developing cartridge having electrode2021
EFEM and method of introducing replacement gas thereinto2021
EFEM and method of introducing replacement gas thereinto2021