Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- De Yuan Xiao (17 patents)
- Guo Qing Chen (10 patents)
- Roger Lee (125 patents)
- Chin Fu Yen (4 patents)
- Su Xing (41 patents)
- Xiao Lu Huang (4 patents)
- Yong Yang (81 patents)