Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Beam regulating apparatus for an EUV illumination beam

Beam regulating apparatus for an EUV illumination beam

US Patent 8853642 · Granted Oct 7, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Combination of inline metrology and on tool metrology for advanced packaging2025
Heterogeneous catalyzed process for the production of 2,2,6,6-tetramethyl-4-pipe2025
Process for the production of the CHA-AFT zeolite intergrowth COE-10 and use the2025
Process for the production of a zeolitic material having an AEI-type framework s2025
Display device with transparent screen element, motor vehicle with display devic2025
Vehicle comprising a display device and an electronic control unit2025
Method for generating a mathematical model for positioning individual mirrors of2024
Display device for displaying a pixel-based graphical content in two directions 2024
Process for the alkylation of aliphatic organic compounds2024
Display device for displaying system states of at least two electrical consumer 2024
Secure provisioning of operating systems2024
Display device and vehicle including the display device2024