Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Crossed field device

Crossed field device

US Patent 8841867 · Granted Sep 23, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Variable inductor device comprising first and second planar loops configured to 2025
Process module chamber providing symmetric RF return path2025
Filter box for a substrate processing system2025
High temperature RF connection with integral thermal choke2025
RF tuning systems including tuning circuits having impedances for setting and ad2025
Temperature monitoring2024
RF signal parameter measurement in an integrated circuit fabrication chamber2024
Depositing a carbon hardmask by high power pulsed low frequency RF2023
Control of wafer bow in multiple stations2023
Non-reciprocal microwave window2023
Systems, methods and apparatus for fabricating and utilizing a cathode2023
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in2023