Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Flare effect induced error correction

Flare effect induced error correction

US Patent 8839157 · Granted Sep 16, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method for optical proximity correction of a modified integrated circ2013
System and method for optical proximity correction of a modified integrated circ2013
Method and system for manufacturing openings on semiconductor devices2012
System for designing mask pattern2011
Method of deriving etching correction values for patterns of photomask and metho2011
Anti-aberration pattern and method for manufacturing the same2010
Controlling system and method for operating the same2009