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Home › Capacitively-coupled electrostatic (CCE) probe arrangement for detecting dechucking in a plasma processing chamber and methods thereof

Capacitively-coupled electrostatic (CCE) probe arrangement for detecting dechucking in a plasma processing chamber and methods thereof

US Patent 8780522 · Granted Jul 15, 2014

Estimated economic value: $61,197,000 ⓘ

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