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Home › Encoder and interferometer that generate M-phase signals by multiplying N-phase signals by M coefficient sets, where N is not less than 6 and M is not smaller than 2

Encoder and interferometer that generate M-phase signals by multiplying N-phase signals by M coefficient sets, where N is not less than 6 and M is not smaller than 2

US Patent 8742322 · Granted Jun 3, 2014

Estimated economic value: $35,000 ⓘ

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