Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fabrication of robust electrothermal MEMS with fast thermal response

Fabrication of robust electrothermal MEMS with fast thermal response

US Patent 8735200 · Granted May 27, 2014

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Color mixing from different light sources2024
Fast foveation camera and controlling algorithms2023
MEMS chip structure2023
Color mixing from different light sources2023
Sensing device2023
Endoscopic OCT probes with immersed MEMS mirrors2022
Color mixing from different light sources2022
Acoustic apparatus with diaphragm supported at a discrete number of locations2021
Microphone with hydrophobic ingress protection2019
Acoustic apparatus with diaphragm supported at a discrete number of locations2019
MEMS automatic alignment high-and-low comb tooth and manufacturing method thereo2018
Acoustic apparatus with diaphragm supported at a discrete number of locations2017