Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Surface modifying material, method of forming resist pattern, and method of forming pattern

Surface modifying material, method of forming resist pattern, and method of forming pattern

US Patent 8735052 · Granted May 27, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Film cleaning solution and method for cleaning film2025
Cleaning composition and cleaning method for component of semiconductor manufact2024
Hard mask-forming composition and method for manufacturing electronic component2024
Hard mask-forming composition and method for manufacturing electronic component2023
Cleaning composition, cleaning method, and method for manufacturing semiconducto2022
Washing method, washing device, storage medium, and washing composition2022
Method for removing organic cured film on substrate, and acidic cleaning liquid2022
Hydrogen detection element, method for manufacturing hydrogen detection element,2021
Resist composition and method of forming resist pattern2021
Resist composition and method of forming resist pattern2020
Method of recovering resist pattern2019
Polyimide-based resin film cleaning liquid, method for cleaning polyimide-based 2018