Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Spin head, apparatus for treating substrate, and method for treating substrate

Spin head, apparatus for treating substrate, and method for treating substrate

US Patent 8714169 · Granted May 6, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Device for etching the periphery edge of a substrate and method for controlling 2025
Substrate treatment apparatus having bowl assembly2025
Substrate support assembly for substrate treatment apparatus2025
Device for etching the periphery edge of a substrate2025
Substrate support assembly for substrate treatment apparatus2024
Substrate treatment apparatus having exhaust structure2024
Device for etching the periphery edge of a substrate comprising substrate sensin2024
Substrate treatment apparatus having back nozzle assembly2024
Substrate treating apparatus comprising ultrasonic wave cleaning unit2024
Substrate processing apparatus and substrate processing system including the sam2022
Flap position sensing device of active air flap system and method of manufacturi2022
Substrate processing apparatus and substrate processing system including the sam2020