Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Determination of the relative position of two structures

Determination of the relative position of two structures

US Patent 8693805 · Granted Apr 8, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and device for evaluating a statistically distributed measured value in t2025
Method and apparatus for evaluating an unknown effect of defects of an element o2024
Apparatus and method for analyzing an element of a photolithography process with2024
Autofocusing method for an imaging device2024
Method for detecting an object structure and apparatus for carrying out the meth2024
Method and apparatus for evaluating an unknown effect of defects of an element o2023
Method, computer program and apparatus for determining a quality of a mask of a 2023
Method for determining an imaging function of a mask inspection microscope, and 2022
Measuring microscope for measuring masks for lithographic methods and measuring 2021
Method for correcting the distortion of a first imaging optical unit of a first 2020
Method for capturing and compensating ambient effects in a measuring microscope2020
Method and apparatus for determining the position of structure elements of a pho2019