Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Periodic signal generators having microelectromechanical resonators therein that support surface wave and bulk acoustic wave modes of operation with different temperature coefficients of frequency

Periodic signal generators having microelectromechanical resonators therein that support surface wave and bulk acoustic wave modes of operation with different temperature coefficients of frequency

US Patent 8680931 · Granted Mar 25, 2014

Estimated economic value: $4,572,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Microelectromechanical resonators having offset [100] and [110] crystal orientat2015
Methods of forming micro-electromechanical resonators having passive temperature2014
Microelectromechanical resonators with thermally-actuated frequency tuning beams2014
Methods of forming micro-electromechanical resonators using passive compensation2013
Methods of packaging microelectromechanical resonators2013
Methods of forming microdevice substrates using double-sided alignment technique2012
Acoustic resonator2008