Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vibrating micromechanical sensor of angular velocity

Vibrating micromechanical sensor of angular velocity

US Patent 8646333 · Granted Feb 11, 2014

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Piezoelectric device2025
Three-axis accelerometer with two masses2025
In-plane and out-of-plane accelerometer2025
MEMS gyrocompass2025
MEMS gyroscope2025
Transducer2025
Method for bonding wafers, and a wafer2025
MEMS structure including a cap with a via2024
Seesaw accelerometer2024
Piezoelectric device2024
Accelerometer with two seesaws2024
Gyroscope with mass pairs2023