Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and system for increasing alignment target contrast

Method and system for increasing alignment target contrast

US Patent 8625096 · Granted Jan 7, 2014

Estimated economic value: $6,333,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Metrology method, target and substrate2025
Methods and apparatus for obtaining diagnostic information relating to an indust2025
Apparatus and method for property joint interpolation and prediction2025
Method for adjusting a target feature in a model of a patterning process based o2025
Methods and apparatus for obtaining diagnostic information relating to an indust2024
Method for adjusting a target feature in a model of a patterning process based o2023
Method and apparatus for angular-resolved spectroscopic lithography characteriza2022
Lithographic method and lithographic apparatus2022
Metrology method, target and substrate2022
Methods and apparatus for obtaining diagnostic information relating to an indust2022
Determining an optimal operational parameter setting of a metrology system2022
Method to change an etch parameter2022