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Home › Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement system

Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement system

US Patent 8614783 · Granted Dec 24, 2013

Estimated economic value: $14,350,000 ⓘ

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