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Home › Microelectromechanical resonators having resistive heating elements therein configured to provide frequency tuning through convective heating of resonator bodies

Microelectromechanical resonators having resistive heating elements therein configured to provide frequency tuning through convective heating of resonator bodies

US Patent 8610336 · Granted Dec 17, 2013

Estimated economic value: $3,078,000 ⓘ

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