Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for fabricating pellicle of EUV mask

Method for fabricating pellicle of EUV mask

US Patent 8535545 · Granted Sep 17, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Phase shift blankmask and photomask for EUV lithography2024
Phase shift blankmask and photomask for EUV lithography2024
Console tray for vehicle having increased capacity2022
Leaf spring assembly for automobile storage body2022
Reflective mask and method of fabricating the same2017
Reflection type blank masks, methods of fabricating the same, and methods of fab2016
Potentiometer2015
Cup holder tray for armrest of automobile2015
Bolting structure of sub-frame2015
Reflection-type photomasks and methods of fabricating the same2014
Reflection type blank masks, methods of fabricating the same, and methods of fab2014
Extreme ultra violet lithography mask and method for fabricating the same2011