Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pivotable MEMS device

Pivotable MEMS device

US Patent 8531752 · Granted Sep 10, 2013

Estimated economic value: $30,250,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Assembly of components having different coefficients of thermal expansion2023
Assembly of components having different coefficients of thermal expansion2021
Hidden hinge MEMS with temporary gimbal anchor2017
Assembly of components having different coefficients of thermal expansion2017
Optomechanical assembly2017
Optical switching device2017
Biaxial MEMS mirror with hidden hinge and staggered electrodes2014
Micro-mirror with electrode spacer2014
Tiltable MEMS mirror2013
Hermetic seal between a package and an optical fiber2013
Counter-balanced MEMS mirror with hidden hinge2012
Electrostatic comb actuator2012