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Home › Circuit for electrostatically driving a plant such as a comb-drive microelectromechanical system (MEMS) mirror and related subsystem, system, and method

Circuit for electrostatically driving a plant such as a comb-drive microelectromechanical system (MEMS) mirror and related subsystem, system, and method

US Patent 8514205 · Granted Aug 20, 2013

Estimated economic value: $606,000 ⓘ

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