Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Chikang Liu (6 patents)
- Zhengying Wei (5 patents)
- GuoXu Zhao (5 patents)
- Yangfeng Li (5 patents)
- Guoliang Zhu (19 patents)
- FangYu Yang (2 patents)