Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Heat transfer assembly, lithographic apparatus and manufacturing method

Heat transfer assembly, lithographic apparatus and manufacturing method

US Patent 8502960 · Granted Aug 6, 2013

Estimated economic value: $10,420,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electrostatic clamp, lithographic apparatus, and device manufacturing method2016
Substrate holder, lithographic apparatus, device manufacturing method, and metho2016
Board-to-board connector2011